SMA MicroParticle ICS Facility Systems

SMA MicroParticle ICS Facility Systems

SMA MicroParticle ICS Facility Systems feature the installation of Remote Particle Counters to measure particle counts in cleanrooms and controlled environments.

Remote Particle Counters simultaneously measure 2 particle size channels, 0.5 and 5.0 μm, with a flow rate of 1.0 CFM (28.3 LPM).  Remote Particle Counters are available in stainless steel surface mount and flush mount enclosures.

Remote Particle Counters are only one piece of the SMA MicroParticle ICS Facility System.  Multiple Particle Counters, Vacuum Pumps, and Controllers are combined into one Facility System managed by the SMA MicroParticle ICS Software.

The Remote Particle Counter data is processed by the SMA MicroParticle ICS Software which presents the information in a regulatory compliant, user friendly interface.  The software generates reports, such as: Audit Trail, Status, Measurement Log, Alarm History, Limit Change History, Notes, and Trends.  Customer specific reports can also be created to match any further requirements.

Product Uses

  • Detect and count physical particles
  • Monitor air quality

Features and Benefits

  • Flow rate is 1.0 CFM (28.3 LPM)
  • Measures 2 channels of simultaneous data, 0.5 and 5.0 μm particles
  • MODBUS, TCP/IP, RS485 and RS232 connections
  • Concentration limit of 500,000 per ft³
  • Complies with ISO 21501-4 and JIS B9921 standards

Software Features

  • Archives data automatically
  • Audit Trail stores all updated settings
  • Facility map displays locations
  • User access is controlled
  • Alarm values are configurable
  • Delivers alarm notifications via text, phone, or email
  • Calculates hourly statistics
  • Complies with21 CFR 11, ISO 14644, and USP 797
Learn how VAI®’s Environmental Control Monitoring Division (ECMD) addresses the needs of industries with a complete range of portable viable environmental monitoring equipment.