SMA MicroParticle ICS Facility Systems feature the installation of Remote Particle Counters to measure particle counts in cleanrooms and controlled environments.
Remote Particle Counters simultaneously measure 2 particle size channels, 0.5 and 5.0 μm, with a flow rate of 1.0 CFM (28.3 LPM). Remote Particle Counters are available in stainless steel surface mount and flush mount enclosures.
Remote Particle Counters are only one piece of the SMA MicroParticle ICS Facility System. Multiple Particle Counters, Vacuum Pumps, and Controllers are combined into one Facility System managed by the SMA MicroParticle ICS Software.
The Remote Particle Counter data is processed by the SMA MicroParticle ICS Software which presents the information in a regulatory compliant, user friendly interface. The software generates reports, such as: Audit Trail, Status, Measurement Log, Alarm History, Limit Change History, Notes, and Trends. Customer specific reports can also be created to match any further requirements.
Product Uses
Features and Benefits
Software Features